ION-ASSISTED THIN-FILM DEPOSITION AND APPLICATIONS

[1] AHMED NAG, THIN SOLID FILMS

[2] PHYSICS OF ION PLATING AND ION-BEAM DEPOSITION [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1973, 10 (01): : 104 - 107

[3] ALLEN TH, 1983, P INT ION ENG C KYOT, V2, P1305

[4] ANDOH Y, 1985, NUCL INSTRUM METHODS, V111, P36

[5] AN INVESTIGATION OF ION-BOMBARDED AND ANNEALED (111) SURFACES OF GE BY SPECTROSCOPIC ELLIPSOMETRY [J]. SURFACE SCIENCE, 1980, 96 (1-3) : 294 - 306

[6] AUWARTER M, 1960, Patent No. 2920002

[7] BABNEV VO, 1976, THIN SOLID FILMS, V38, P1

[8] BEHRISCH R, 1983, TOPICS APPLIED PHYSI, V52

[9] Bunshah R. F., 1982, DEPOSITION TECHNOLOG

[10] INFLUENCE OF ION-BOMBARDMENT ON MICROSTRUCTURE OF THICK DEPOSITS PRODUCED BY HIGH RATE PHYSICAL VAPOR-DEPOSITION PROCESSES [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1972, 9 (06): : 1404 - &

[1] AHMED NAG, THIN SOLID FILMS

[2] PHYSICS OF ION PLATING AND ION-BEAM DEPOSITION [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1973, 10 (01): : 104 - 107

[3] ALLEN TH, 1983, P INT ION ENG C KYOT, V2, P1305

[4] ANDOH Y, 1985, NUCL INSTRUM METHODS, V111, P36

[5] AN INVESTIGATION OF ION-BOMBARDED AND ANNEALED (111) SURFACES OF GE BY SPECTROSCOPIC ELLIPSOMETRY [J]. SURFACE SCIENCE, 1980, 96 (1-3) : 294 - 306

[6] AUWARTER M, 1960, Patent No. 2920002

[7] BABNEV VO, 1976, THIN SOLID FILMS, V38, P1

[8] BEHRISCH R, 1983, TOPICS APPLIED PHYSI, V52

[9] Bunshah R. F., 1982, DEPOSITION TECHNOLOG

[10] INFLUENCE OF ION-BOMBARDMENT ON MICROSTRUCTURE OF THICK DEPOSITS PRODUCED BY HIGH RATE PHYSICAL VAPOR-DEPOSITION PROCESSES [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1972, 9 (06): : 1404 - &