O-2 GAS-PRESSURE EFFECTS ON SURFACE-MORPHOLOGY IN FERROELECTRIC BI4TI3O12 THIN-FILMS FABRICATED BY SPIN-COATING PYROLYSIS

被引：23

作者：

KAKIMI, A

OKAMURA, S

TSUKAMOTO, T

机构：

[1] Department of Applied Physics, Science University of Tokyo, Shinjuku, Tokyo, 162

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1994年 / 33卷 / 12A期

关键词：

THIN FILM; BI4TI3O12; FERROELECTRIC; SPIN-COATING PYROLYSIS; METAL NAPHTHENATE; O-2 GAS PRESSURE;

D O I：

10.1143/JJAP.33.L1707

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Fabrication of ferroelectric Bi4Ti3O12 thin films was carried out by spin-coating pyrolysis of Bi and Ti naphthenates and successive heat treatments in Oz gas. Heat treatments in Oz gas were effective for fabrication of ferroelectric Bi4Ti3O12 thin films with c-axis orientation. It was confirmed that the him surface morphology strongly depends on the Oz gas pressure. Smooth platelike grains of the size greater than 10 x 10 mu m(2) formed extensively in thin films upon heat treatment at the Oz gas pressure of 4.0 x 10(5) Pa. The film thickness was 500 nm. The thin film was a single phase of Bi4Ti3O12 completely oriented along the c-axis with good ferroelectric properties at room temperature: coercive field of 15 kV/cm, remanent polarization of 1.9 mu C/cm(2), dielectric constant of 43 and loss of 0.02.

引用

页码：L1707 / L1709

页数：3

共 10 条

[1] PULSED LASER DEPOSITION AND FERROELECTRIC CHARACTERIZATION OF BISMUTH TITANATE FILMS [J].

BUHAY, H ;

SINHAROY, S ;

KASNER, WH ;

FRANCOMBE, MH ;

LAMPE, DR ;

STEPKE, E .

APPLIED PHYSICS LETTERS, 1991, 58 (14) :1470-1472

[2] ELECTRICAL AND OPTICAL PROPERTIES OF FERROELECTRIC BI4TI3O12 SINGLE CRYSTALS [J].

CUMMINS, SE ;

CROSS, LE .

JOURNAL OF APPLIED PHYSICS, 1968, 39 (05) :2268-&

[3] FABRICATION OF FERROELECTRIC BI4TI3O12 THIN-FILMS BY DIPPING-PYROLYSIS OF METAL NAPHTHENATES AND MICROPATTERNS BY AN ELECTRON-BEAM [J].

KAKIMI, A ;

OKAMURA, S ;

YAGI, Y ;

MORI, K ;

TSUKAMOTO, T .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1994, 33 (9B) :5301-5304

[4] EXCIMER LASER-ABLATED BISMUTH TITANATE THIN-FILMS [J].

MAFFEI, N ;

KRUPANIDHI, SB .

APPLIED PHYSICS LETTERS, 1992, 60 (06) :781-783

[5] PREPARATION OF BI4TI3O12 FILMS ON A SINGLE-CRYSTAL SAPPHIRE SUBSTRATE WITH ELECTRON-CYCLOTRON RESONANCE PLASMA SPUTTERING [J].

MASUMOTO, H ;

GOTO, T ;

MASUDA, Y ;

BABA, A ;

HIRAI, T .

APPLIED PHYSICS LETTERS, 1991, 58 (03) :243-245

[6] PREPARATION OF C-AXIS-ORIENTED BI4TI3O-12 THIN-FILMS BY METALORGANIC CHEMICAL-VAPOR-DEPOSITION [J].

NAKAMURA, T ;

MUHAMMET, R ;

SHIMIZU, M ;

SHIOSAKI, T .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1993, 32 (9B) :4086-4088

[7]

OKAMURA S, 1994, IN PRESS T MATER R B, V14

[8] GRAIN-ORIENTATION AND ELECTRICAL-PROPERTIES OF HOT-FORGED BI4TI3O12 CERAMICS [J].

TAKENAKA, T ;

SAKATA, K .

JAPANESE JOURNAL OF APPLIED PHYSICS, 1980, 19 (01) :31-39

[9] SYNTHESIS AND CHARACTERIZATION OF BI4TI3O-12 THIN-FILMS BY SOL-GEL PROCESSING [J].

TOYODA, M ;

HAMAJI, Y ;

TOMONO, K ;

PAYNE, DA .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1993, 32 (9B) :4158-4162

[10]

YOSHIMURA K, 1994, NIPPON SERAM KYO GAK, V102, P512, DOI 10.2109/jcersj.102.512

← 1 →