PREPARATION OF CO-ZN FERRITE FILMS AT LOW SUBSTRATE-TEMPERATURE BY PLASMA-FREE DC SPUTTERING FOR MAGNETIC RECORDING MEDIA

Co-Zn ferrite films with small grains for magnetic recording media at ultrahigh density were deposited ''plasma free'' on a substrate by using the dc facing targets sputtering apparatus without subsequent annealing process. The films deposited at a substrate temperature T(s) as low as 90-degrees-C were composed of crystallites' with excellent (111) orientation and exhibited a saturation magnetization 4piM(s) of 3.3 kG and an in-plane and perpendicular coercivity H(c parallel-to) and H(c perpendicular-to) of 1.8 and 2.2 kOe, respectively. The films deposited at a T(s) of 250-degrees-C exhibited 4piM, of 4.8 kG and possessed almost the same H(c parallel-to) and H(c perpendicular-to) of 1.5 kOe.