FORMATION OF BA-FERRITE FILMS WITH PERPENDICULAR MAGNETIZATION BY TARGETS-FACING TYPE OF SPUTTERING

被引：66

作者：

MATSUOKA, M

HOSHI, Y

NAOE, M

YAMANAKA, S

机构：

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1982年 / 18卷 / 06期

关键词：

D O I：

10.1109/TMAG.1982.1062006

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1119 / 1121

页数：3

共 7 条

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[5] FACING TARGETS TYPE OF SPUTTERING METHOD FOR DEPOSITION OF MAGNETIC METAL-FILMS AT LOW-TEMPERATURE AND HIGH-RATE [J].

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IEEE TRANSACTIONS ON MAGNETICS, 1980, 16 (05) :646-648

[6] A REACTIVE SPUTTERING METHOD FOR PREPARATION OF BERTHOLLIDE TYPE OF IRON-OXIDE FILMS [J].

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JOURNAL OF APPLIED PHYSICS, 1982, 53 (03) :2748-2750

[7]

NAOE M, 1981, IEEE T MAGN, V17, P3184, DOI 10.1109/TMAG.1981.1061729

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