ELECTRON BEAM SPECTROMETER FOR MEASUREMENT OF ANGULAR DISTRIBUTION OF PLASMA LOSSES IN THIN FILMS

被引：2

作者：

COLE, RS

JENNINGS, JC

机构：

来源：

关键词：

D O I：

10.1088/0022-3727/4/1/308

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：54 / &

共 30 条

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