ELECTRON BEAM SPECTROMETER FOR MEASUREMENT OF ANGULAR DISTRIBUTION OF PLASMA LOSSES IN THIN FILMS

被引：2

作者：

COLE, RS

JENNINGS, JC

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来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1971年 / 4卷 / 01期

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D O I：

10.1088/0022-3727/4/1/308

中图分类号：

O59 [应用物理学];

学科分类号：

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页码：54 / &

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