RECTIFICATION AND INTERNAL PHOTOEMISSION IN METAL CVD DIAMOND AND METAL CVD DIAMOND/SILICON STRUCTURES

被引:25
作者
GROT, SA
LEE, S
GILDENBLAT, GS
HATFIELD, CW
WRONSKI, CR
BADZIAN, AR
BADZIAN, T
MESSIER, R
机构
[1] PENN STATE UNIV,DEPT ELECT ENGN,UNIVERSITY PK,PA 16802
[2] PENN STATE UNIV,MAT RES LAB,UNIVERSITY PK,PA 16802
[3] PENN STATE UNIV,DEPT ENGN SCI & MECH,UNIVERSITY PK,PA 16802
关键词
D O I
10.1557/JMR.1990.2497
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Schottky diodes were formed with free-standing polycrystalline thin film diamond base as well as with polycrystalline diamond films grown on crystalline silicon. Current-voltage and internal photoemission measurements were used to characterize the Schottky diodes and the diamond film. Internal photoemission measurements yielded a barrier height of 1.15 eV. A comparison of experimental data for metal contacts to free-standing diamond films and those on silicon substrates indicates that both rectification and internal photoemission originate at the metal/diamond interface. © 1990, Materials Research Society. All rights reserved.
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页码:2497 / 2501
页数:5
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