KINETIC-STUDY ON CHEMICAL VAPOR-DEPOSITION OF TITANIUM DISULFIDE THIN-FILM

被引:25
作者
KANEHORI, K
KIRINO, F
ITO, Y
MIYAUCHI, K
KUDO, T
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D O I
10.1149/1.2096903
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
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页码:1265 / 1270
页数:6
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