MAPPING OF ELECTRICAL LEAKAGE IN TRANSISTORS BY ANODIC-OXIDATION

[1] NONDESTRUCTIVE OPTICAL TECHNIQUE FOR ELECTRICALLY TESTING INSULATED-GATE INTEGRATED CIRCUITS [J]. ELECTRONICS LETTERS, 1971, 7 (15) : 432 - &

[2] ANODIC DISSOLUTION OF SILICON IN HYDROFLUORIC ACID SOLUTIONS [J]. SURFACE SCIENCE, 1966, 4 (02) : 109 - &

[3] PLANTINGA GH, 1969, IEEE T ELECTRON DEVI, VED16, P394

[4] WARNER RW, 1965, INTEGRATED CIRCUITS, P149

[1] NONDESTRUCTIVE OPTICAL TECHNIQUE FOR ELECTRICALLY TESTING INSULATED-GATE INTEGRATED CIRCUITS [J]. ELECTRONICS LETTERS, 1971, 7 (15) : 432 - &

[2] ANODIC DISSOLUTION OF SILICON IN HYDROFLUORIC ACID SOLUTIONS [J]. SURFACE SCIENCE, 1966, 4 (02) : 109 - &

[3] PLANTINGA GH, 1969, IEEE T ELECTRON DEVI, VED16, P394

[4] WARNER RW, 1965, INTEGRATED CIRCUITS, P149