LUBRICATING PERFORMANCE ENHANCEMENT OF AMORPHOUS-SILICON CARBIDE FILM BY ANNEALING EFFECTS AND MICROBEAM ANALYSES OF THE TRIBOLOGICAL INTERFACE

被引：15

作者：

SUGIMOTO, I

MIYAKE, S

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 66卷 / 02期

关键词：

D O I：

10.1063/1.343576

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：596 / 604

页数：9

共 27 条

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