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NEW 3S METHOD TO EXAMINE SURFACE-ROUGHNESS OF BROAD ION-BEAM SPUTTERED MATERIALS

被引：3
作者：
KOWALSKI, ZW
JERZMANSKI, D
机构：
[1] Technical Univ of Wroclaw, Wroclaw, Pol, Technical Univ of Wroclaw, Wroclaw, Pol
来源：
JOURNAL OF MATERIALS SCIENCE LETTERS | 1987年 / 6卷 / 07期
关键词：
D O I：
10.1007/BF01729030
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
5
引用
收藏
页码：837 / 838
页数：2
相关论文
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