INFLUENCE OF FINITE METAL OVERLAYER RESISTANCE ON THE EVALUATION OF CONTACT RESISTIVITY

被引：8

作者：

KOVACS, B

MOJZES, I

机构：

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 1986年 / 33卷 / 09期

关键词：

D O I：

10.1109/T-ED.1986.22683

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

收藏

页码：1401 / 1403

页数：3

相关论文

共 5 条

[1] CONTACT RESISTANCE AND CONTACT RESISTIVITY [J].

BERGER, HH .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1972, 119 (04) :507-&

[2]

Kellner W., 1975, Siemens Forschungs- und Entwicklungsberichte, V4, P137

[3] THE EFFECTS OF CONTACT SIZE AND NON-ZERO METAL RESISTANCE ON THE DETERMINATION OF SPECIFIC CONTACT RESISTANCE [J].

MARLOW, GS ;

DAS, MB .

SOLID-STATE ELECTRONICS, 1982, 25 (02) :91-94

[4] CONTACT RESISTANCE OF POLYSILICON SILICON INTERCONNECTIONS [J].

REEVES, GK ;

HARRISON, HB .

ELECTRONICS LETTERS, 1982, 18 (25-2) :1083-1085

[5] A TRANSMISSION-LINE MODEL FOR SILICIDED DIFFUSIONS - IMPACT ON THE PERFORMANCE OF VLSI CIRCUITS [J].

SCOTT, DB ;

HUNTER, WR ;

SCHICHIJO, H .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1982, 29 (04) :651-661