SPUTTERING IN A CROSSED ELECTROMAGNETIC FIELD

被引：8

作者：

WASA, K

HAYAKAWA, S

机构：

来源：

IEEE TRANSACTIONS ON PARTS MATERIALS AND PACKAGING | 1967年 / PMP3卷 / 03期

关键词：

D O I：

10.1109/TPMP.1967.1135730

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：71 / &

共 8 条

[1]

FLUGGE S, 1956, HANDBUCH PHYSIK, V21, P570

GILL, WD ;

KAY, E .

[3] DISCHARGES BETWEEN COAXIAL CYLINDERS IN A MAGNETIC FIELD [J].

HAYAKAWA, S ;

WASA, K .

[4]

HOLLAND L, 1956, VACUUM DEPOSITION TH, P410

KAY, E .

[6]

Kay E., 1962, ADV ELECTRON, V17, P245

[7]

PENNING FM, 1936, Patent No. 2146025

[8] INSTABILITY OF ROTATING ELECTRON SHEATH IN CROSSED FIELD DEVICE [J].

WASA, K ;

HAYAKAWA, S .