MICROGRATINGS FOR HIGH-EFFICIENCY GUIDED-BEAM DEFLECTION FABRICATED BY ELECTRON-BEAM DIRECT-WRITING TECHNIQUES

被引:26
作者
HANDA, Y
SUHARA, T
NISHIHARA, H
KOYAMA, J
机构
来源
APPLIED OPTICS | 1980年 / 19卷 / 16期
关键词
D O I
10.1364/AO.19.002842
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
引用
收藏
页码:2842 / 2847
页数:6
相关论文
共 16 条
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