DIRECT WRITING OF OPTICAL GRATINGS USING A SCANNING ELECTRON-MICROSCOPE

被引：38

作者：

NISHIHARA, H

HANDA, Y

SUHARA, T

KOYAMA, J

机构：

来源：

APPLIED OPTICS | 1978年 / 17卷 / 15期

关键词：

D O I：

10.1364/AO.17.002342

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

收藏

页码：2342 / 2345

页数：4

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[2] HOLOCOUPLER - NOVEL COUPLER FOR OPTICAL CIRCUITS
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[4] GRATINGS FOR INTEGRATED OPTICS BY ELECTRON LITHOGRAPHY
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[J]. APPLIED OPTICS, 1974, 13 (07) : 1695 - 1702
[5] NONOXIDE CHALCOGENIDE GLASS-FILMS FOR INTEGRATED OPTICS
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