NEGATIVE-IONS OF SPUTTERED CATHODE SPECIES IN A GLOW-DISCHARGE

被引：10

作者：

BENTZ, BL ^{[1
]}

HARRISON, WW ^{[1
]}

机构：

[1] UNIV VIRGINIA,DEPT CHEM,CHARLOTTESVILLE,VA 22901

来源：

INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES | 1981年 / 37卷 / 02期

关键词：

D O I：

10.1016/0020-7381(81)80005-8

中图分类号：

O64 [物理化学（理论化学）、化学物理学]; O56 [分子物理学、原子物理学];

学科分类号：

070203 ; 070304 ; 081704 ; 1406 ;

摘要：

引用

收藏

页码：167 / 176

页数：10

相关论文

共 38 条

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[7] TRACE-ELEMENT ANALYSIS OF BULK METALS WITH A HOLLOW-CATHODE DISCHARGE AND A QUADRUPOLE MASS FILTER
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[J]. ANALYTICAL CHEMISTRY, 1979, 51 (06) : 673 - 678
[8] NEGATIVE-IONS IN PLASMA CHROMATOGRAPHY MASS SPECTROMETRY
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[9] Coburn J. W., 1974, Japanese Journal of Applied Physics, P501
[10] PLASMA DIAGNOSTICS OF AN RF-SPUTTERING GLOW DISCHARGE
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