PLASMA DIAGNOSTICS OF AN RF-SPUTTERING GLOW DISCHARGE

被引：162

作者：

COBURN, JW

KAY, E

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来源：

APPLIED PHYSICS LETTERS | 1971年 / 18卷 / 10期

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D O I：

10.1063/1.1653483

中图分类号：

O59 [应用物理学];

学科分类号：

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页码：435 / &

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