A SYSTEM FOR DETERMINING MASS ENERGY OF PARTICLES INCIDENT ON A SUBSTRATE IN A PLANAR DIODE SPUTTERING SYSTEM

被引：122

作者：

COBURN, JW

机构：

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1970年 / 41卷 / 08期

关键词：

D O I：

10.1063/1.1684763

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

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页码：1219 / &

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