SPUTTERING ION SOURCE FOR SOLIDS

被引：82

作者：

LIEBL, HJ

HERZOG, RFK

机构：

来源：

关键词：

D O I：

10.1063/1.1729826

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2893 / &

共 20 条

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[3]

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[4]

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[5]

GORMAN JG, 1951, ANAL CHEM, V23, P439

[6] ION SOURCE FOR MASS SPECTROGRAPHY [J].

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VIEHBOCK, FP .

PHYSICAL REVIEW, 1949, 76 (06) :855-856

[7]

HICKAM WM, 1948, PHYS REV, V74, P1222

[8]

HICKAM WM, 1953, ASTM B, V149, P17

[9] SPUTTERING OF SURFACES BY POSITIVE ION BEAMS OF LOW ENERGY [J].

HONIG, RE .

[10] MASS SPECTROMETRIC ANALYSIS OF GERMANIUM [J].

HONIG, RE .