INFLUENCE OF RESIDUAL GASES ON THE PROPERTIES OF DC MAGNETRON-SPUTTERED ALUMINUM-SILICON

被引：17

作者：

NOWICKI, RS

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1980年 / 17卷 / 01期

关键词：

D O I：

10.1116/1.570395

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：384 / 387

页数：4

共 5 条

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