GAS-PHASE VERSUS SURFACE CONTRIBUTIONS TO PHOTOLYTIC LASER CHEMICAL VAPOR-DEPOSITION RATES

被引:28
作者
BRAICHOTTE, D
VANDENBERGH, H
机构
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1988年 / 45卷 / 04期
关键词
D O I
10.1007/BF00617940
中图分类号
T [工业技术];
学科分类号
08 ;
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页码:337 / 343
页数:7
相关论文
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