The processes resulting in the loss of vicinal-surface morphological stability under the action of a supersaturation gradient on the face and the presence of growth-decelerating impurities have been studied by in situ laser interferometry. It has been established that these processes are most pronounced in the supersaturation range corresponding to the maximum partial derivatives of the tangential velocity of the elementary layer motion with respect to supersaturation and impurity concentration. It has been suggested that the change of the dislocation hillock shape accompanying the formation of macrosteps is due to anisotropy of the surface energy. © 1990.