RADIO-FREQUENCY SPUTTERED NIFE FILMS ON AU

The coercivity of rf-sputtered thick NiFe films ( APP GRTH 0. 3 mu m) on thick gold ( APP GRTH 0. 3 mu m) is generally lower than in films deposited by thermal evaporation. Especially low values of coercivity (H//c less than equivalent to 0. 7 Oe) are obtained in NiFe films on gold conductors which are deposited onto thin adhesive layers of refractory metals having lattice parameters around 3 A. For a given NiFe film thickness, the coercivity is shown to decrease with increasing gold thickness up to 1 mu m in sharp contrast to evaporated films.