THE CHEMICAL VAPOR-DEPOSITION OF TIB2 FROM DIBORANE

被引：56

作者：

PIERSON, HO

MULLENDORE, AW

机构：

来源：

THIN SOLID FILMS | 1980年 / 72卷 / 03期

关键词：

Compendex;

D O I：

10.1016/0040-6090(80)90540-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Titanium compounds

引用

页码：511 / 516

页数：6

共 8 条

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[2]

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[3] BORIDING WITH A THERMALLY UNSTABLE GAS (DIBORANE) [J].

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FRANTZ, C ;

GANTOIS, M .

METALLURGICAL TRANSACTIONS A-PHYSICAL METALLURGY AND MATERIALS SCIENCE, 1979, 10 (11) :1739-1743

[4]

DIBORANE, 1976, CALLERY CHEM CO TECH

[5] TITANIUM DIBORIDE COATINGS AND THEIR INTERACTION WITH SUBSTRATES [J].

PIERSON, HO ;

RANDICH, E .

THIN SOLID FILMS, 1978, 54 (01) :119-128

[6] CHEMICAL VAPOR-DEPOSITION OF TIB2 ON GRAPHITE [J].

PIERSON, HO ;

RANDICH, E ;

MATTOX, DM .

JOURNAL OF THE LESS-COMMON METALS, 1979, 67 (02) :381-388

[7]

PIERSON HO, 1979, 7TH P INT C CHEM VAP, P360

[8] CHEMICAL VAPOR-DEPOSITION OF TITANIUM DIBORIDE [J].

TAKAHASHI, T ;

KAMIYA, H .

JOURNAL OF CRYSTAL GROWTH, 1974, 26 (02) :203-209

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