NON-LATTICE MATCHED GROWTH OF INXGA1-XAS (0.53-LESS-THAN-X-LESS-THAN-0.80) ON INP

被引:11
作者
FISCHERCOLBRIE, A
JACOWITZ, RD
AST, DG
机构
[1] HEWLETT PACKARD CO,CTR RES & DEV,DIV INTEGRATED CIRCUITS BUSINESS,PALO ALTO,CA 94304
[2] CORNELL UNIV,DEPT MAT SCI & ENGN,ITHACA,NY 14854
关键词
D O I
10.1016/0022-0248(93)90683-N
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
The linearly-graded low-temperature buffer (LGLTB) approach developed by Harmand et al. [1] for growing materials with lattice parameters different from the substrate was extended to thick layers and minority carrier devices, using InxGa1-xAs alloys with x = 0.53 to 0.80 on InP. Structurally, the device layers were 90% to 100% relaxed with less than mid 10(5) cm-2 threading dislocations. Mobilities for 3 mum thick layers as well as modulation-doped structures of In0.80Ga0.20As were as high as 16,300 cm2/V.s at room temperature. p-n Homojunction diodes were nearly ideal and could be modeled with a diffusion-controlled leakage current using minority carrier lifetimes of tau(n) = tau(p) = 5 X 10(-9) s.
引用
收藏
页码:560 / 565
页数:6
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