A Method for Determining Absorption Parameters Based on the Multi-Beam Dynamical Theory of Electron Diffraction

被引:7
作者
Sheinin, S. S. [1 ]
Botros, K. Z. [1 ]
Cann, C. D. [1 ]
机构
[1] Univ Alberta, Dept Phys, Edmonton, AB, Canada
来源
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 1970年 / 3卷 / 02期
关键词
D O I
10.1002/pssa.19700030229
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A method for determining absorption parameters, which is based on the multi-beam dynamical theory of electron diffraction, has been developed. The method is based on the sensitivity of computer calculated multi-beam intensity profiles to the values of the absorption parameters used. Experimental intensity profiles are obtained by making use of the fact that a specimen can be tilted to an orientation where multi-beam effects are important. Experimental absorption parameters obtained for molybdenum are in good agreement with the theoretical values of Humphreys and Hirsch.
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页码:537 / 543
页数:7
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