PLASMA ENHANCED BEAM DEPOSITION OF THIN DIELECTRIC FILMS

[1] THE ACTIVATED REACTIVE EVAPORATION PROCESS - DEVELOPMENTS AND APPLICATIONS [J]. THIN SOLID FILMS, 1981, 80 (1-3) : 255 - 261

[2] MULTIPURPOSE PLASMA REACTOR FOR MATERIALS RESEARCH AND PROCESSING [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1977, 14 (01): : 278 - 280

[3] Harper J. M. E., 1978, THIN FILM PROCESSES, P175

[4] HOLLAHAN JR, 1978, THIN FILM PROCESSES, P335

[5] KERN W, 1978, THIN FILM PROCESSES, P258

[6] MEINERS LG, 1982, J VAC SCI TECHNOL, V21, P665

[7] PETERS JW, 1980, SOLID STATE TECHNOL, V121

[8] THORNTON JA, 1978, THIN FILM PROCESSES, P176

[9] VOSSEN JL, 1978, THIN FILM PROCESSES, P11

[10] [No title captured]

[1] THE ACTIVATED REACTIVE EVAPORATION PROCESS - DEVELOPMENTS AND APPLICATIONS [J]. THIN SOLID FILMS, 1981, 80 (1-3) : 255 - 261

[2] MULTIPURPOSE PLASMA REACTOR FOR MATERIALS RESEARCH AND PROCESSING [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1977, 14 (01): : 278 - 280

[3] Harper J. M. E., 1978, THIN FILM PROCESSES, P175

[4] HOLLAHAN JR, 1978, THIN FILM PROCESSES, P335

[5] KERN W, 1978, THIN FILM PROCESSES, P258

[6] MEINERS LG, 1982, J VAC SCI TECHNOL, V21, P665

[7] PETERS JW, 1980, SOLID STATE TECHNOL, V121

[8] THORNTON JA, 1978, THIN FILM PROCESSES, P176

[9] VOSSEN JL, 1978, THIN FILM PROCESSES, P11

[10] [No title captured]