MULTIPURPOSE PLASMA REACTOR FOR MATERIALS RESEARCH AND PROCESSING

[1] BERNABEI S, 1974, 2ND TOP C RF PLASM H

[2] PLASMA OXIDATION OF GAAS [J]. APPLIED PHYSICS LETTERS, 1976, 29 (01) : 56 - 58

[3] PARAMETRICALLY INDUCED NONLINEAR WAVE-PARTICLE SCATTERING AND PLASMA-HEATING NEAR LOWER HYBRID FREQUENCY [J]. PHYSICAL REVIEW LETTERS, 1974, 32 (22) : 1227 - 1231

[4] NAKASHIMA H, 1976, P DEVICE RESEARCH C

[5] STIX TH, 1962, THEORY PLASMA WAVES

[1] BERNABEI S, 1974, 2ND TOP C RF PLASM H

[2] PLASMA OXIDATION OF GAAS [J]. APPLIED PHYSICS LETTERS, 1976, 29 (01) : 56 - 58

[3] PARAMETRICALLY INDUCED NONLINEAR WAVE-PARTICLE SCATTERING AND PLASMA-HEATING NEAR LOWER HYBRID FREQUENCY [J]. PHYSICAL REVIEW LETTERS, 1974, 32 (22) : 1227 - 1231

[4] NAKASHIMA H, 1976, P DEVICE RESEARCH C

[5] STIX TH, 1962, THEORY PLASMA WAVES