A SILICON INTEGRATED CIRCUIT FORCE SENSOR

被引：8

作者：

FULKERSON, DE

机构：

[1] Solid State Electronics Center, Honey-well Inc., Hopkins

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 1969年 / ED16卷 / 10期

关键词：

D O I：

10.1109/T-ED.1969.16871

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A piezoresistive bridge and integrated circuit amplifier can be made in the same silicon cantilever. The purpose of the amplifier is to linearize as well as amplify the output. © 1969 IEEE. All rights reserved.

引用

页码：867 / +

页数：1