THE INFLUENCE OF SUBSTRATE BIAS ON THE MORPHOLOGY AND CHARGE CAPACITY OF RF-SPUTTERED IRIDIUM OXIDE-FILMS

被引：19

作者：

KLEIN, JD

CLAUSON, SL

COGAN, SF

机构：

来源：

JOURNAL OF MATERIALS RESEARCH | 1989年 / 4卷 / 06期

关键词：

D O I：

10.1557/JMR.1989.1505

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：1505 / 1510

页数：6

共 18 条

[1]

AGNEW WF, 1983, Q PROGR REPORTS

[2]

[Anonymous], 1985, MRS P, DOI DOI 10.1557/PROC-55-303

[3] ORIENTATION OF RF-SPUTTER-DEPOSITED MOS2 FILMS [J].

BERTRAND, PA .

JOURNAL OF MATERIALS RESEARCH, 1989, 4 (01) :180-184

[4]

COGAN SF, 1987, SOC PHOTOOPT INSTRUM, V692, P32

[5] ELECTROCHROMISM IN ANODIC IRIDIUM OXIDE-FILMS .2. PH EFFECTS ON CORROSION STABILITY AND THE MECHANISM OF COLORATION AND BLEACHING [J].

GOTTESFELD, S ;

MCINTYRE, JDE .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1979, 126 (05) :742-750

[6] ANODIC EVOLUTION OF OXYGEN ON SPUTTERED IRIDIUM OXIDE-FILMS [J].

HACKWOOD, S ;

SCHIAVONE, LM ;

DAUTREMONTSMITH, WC ;

BENI, G .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1981, 128 (12) :2569-2573

[7] VOLUME CHANGES INDUCED BY THE ELECTROCHROMIC PROCESS IN SPUTTERED IRIDIUM OXIDE-FILMS [J].

HACKWOOD, S ;

DAUTREMONTSMITH, WC ;

BENI, G ;

SCHIAVONE, LM ;

SHAY, JL .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1981, 128 (06) :1212-1214

[8] BLUE SPUTTERED IRIDIUM OXIDE-FILMS (BLUE SIROFS) [J].

KANG, KS ;

SHAY, JL .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1983, 130 (04) :766-769

[9]

KLEIN JD, 1989, IN PRESS J VAC SCI A

[10] ANODIC IRIDIUM OXIDE-FILMS - XPS-STUDIES OF OXIDATION-STATE CHANGES AND O-2-EVOLUTION [J].

KOTZ, R ;

NEFF, H ;

STUCKI, S .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1984, 131 (01) :72-77

← 1 2 →