SPECTROSCOPIC IR ELLIPSOMETRY WITH IMPERFECT COMPONENTS

被引：13

作者：

DENBOER, JHWG

KROESEN, GMW

HAVERLAG, M

DEHOOG, FJ

机构：

[1] Eindhoven University of Technology, 5600 MB Eindhoven

来源：

THIN SOLID FILMS | 1993年 / 234卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(93)90278-W

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this paper the effect of imperfect components in a spectroscopic IR ellipsometer on the ellipsometer behaviour is investigated. Polarizers, source and detector are described by Mueller matrices. A possibility of constructing better wire grid polarizers is discussed. Calculations are performed analytically, leading to new criteria for the calibration of a spectroscopic ellipsometer.

引用

页码：323 / 326

页数：4