SOME CHARACTERISTICS OF AN INVERTED MAGNETRON COLD-CATHODE IONIZATION GAUGE WITH DUAL FEEDTHROUGHS

被引：19

作者：

PEACOCK, NT

PEACOCK, RN

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 03期

关键词：

D O I：

10.1116/1.575662

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1141 / 1144

页数：4

共 21 条

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