THE SUBSTRATE HEATING EFFECTS ON ION-BEAM SPUTTER-DEPOSITED CUINS2 AND GAP THIN-FILMS

被引：3

作者：

CHEN, JR

NEE, CC

HWANG, HL

LU, L

LIU, YC

机构：

[1] NATL TSING HUA UNIV, DEPT ELECT ENGN, HSINCHU 300, TAIWAN

[2] NATL TSING HUA UNIV, DEPT PHYS, HSINCHU 300, TAIWAN

来源：

APPLICATIONS OF SURFACE SCIENCE | 1982年 / 11-2卷 / JUL期

关键词：

D O I：

10.1016/0378-5963(82)90099-X

中图分类号：

学科分类号：

摘要：

引用

页码：544 / 552

页数：9

共 18 条

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[4]

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[9]

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