THIN-FILM MOLYBDENUM SILICIDE AS POTENTIAL TEMPERATURE SENSORS FOR TURBINE-ENGINES

被引：10

作者：

HO, CH

PRAKASH, S

DESHPANDEY, CV

DOERR, HJ

BUNSHAH, RF

机构：

[1] Univ of California, United States

来源：

SURFACE & COATINGS TECHNOLOGY | 1989年 / 39卷 / 1-3期

关键词：

Coatings;

D O I：

10.1016/0257-8972(89)90043-1

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：79 / 87

页数：9

共 12 条

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ATKINSON WH, NASA CR18211 REP

[2]

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[4]

BUDHANI RC, 1986, J VAC SCI TECHNOL A, V4, P2608

[5]

DILS RR, 1975, ADV TEST MEASUREMENT, V12, P127

[6] THIN-FILM TEMPERATURE SENSORS DEPOSITED BY RADIOFREQUENCY CATHODIC SPUTTERING [J].

GODEFROY, JC ;

GAGEANT, C ;

FRANCOIS, D ;

PORTAT, M .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (05) :2917-2923

[7]

GRANT HP, 1980, NASA CR159782 CHEM P

[8]

MURARKA S, 1983, SILICIDES VLSI APPLI, P46

[9]

PERKIN RA, 1964, 1964 GOLD GAT MET C, V2

[10] DEVELOPMENT OF THIN-FILM TEMPERATURE SENSORS FOR HIGH-PERFORMANCE TURBO-JET ENGINES [J].

PRAKASH, S ;

BUDHANI, RC ;

BUNSHAH, RF .

MATERIALS RESEARCH BULLETIN, 1988, 23 (02) :187-195

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