THIN-FILM TEMPERATURE SENSORS DEPOSITED BY RADIOFREQUENCY CATHODIC SPUTTERING

被引：21

作者：

GODEFROY, JC

GAGEANT, C

FRANCOIS, D

PORTAT, M

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 05期

关键词：

D O I：

10.1116/1.574265

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2917 / 2923

页数：7

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