DEVELOPMENT OF MICROWAVE PLASMA CATHODE FOR ION SOURCES

被引：21

作者：

MATSUBARA, Y ^{[1
]}

TAHARA, H ^{[1
]}

NOGAWA, S ^{[1
]}

ISHIKAWA, J ^{[1
]}

机构：

[1] KYOTO UNIV,DEPT ELECTR,KYOTO 606,JAPAN

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1990年 / 61卷 / 01期

关键词：

D O I：

10.1063/1.1141245

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A new type of electron source for ion sources, which serves as a cathode has been developed. In this cathode, a high-density microwave plasma is produced under the electron-cyclotron-resonance (ECR) condition, and a high electron current of several amperes can be extracted from it. The structure of this microwave plasma (MP) cathode is very simple and compact. A rod antenna connected to a coaxial line for introducing the microwave power (2.45 GHz) and a rare-earth metal permanent magnet for producing the ECR condition are major components. Since there is no filament in this MP cathode, it has a longer lifetime than the equivalent thermionic filament electron emitter. It offers a great advantage to the operation with reactive as well as inert gases. This MP cathode has been adapted in Kaufman-type ion source and have successfully obtained an argon ion-beam current of 110 mA and an oxygen ion-beam current of 43 mA in 25 mm diameter.

引用

页码：541 / 543

页数：3

共 6 条

[1] AXIAL MAGNETIC-FIELD EXTRACTION-TYPE MICROWAVE ION-SOURCE WITH A PERMANENT-MAGNET [J].