OPTICAL PHENOMENA OBSERVED IN LOW-ENERGY ION AND ELECTRON-BOMBARDMENT OF SILICA SURFACES

被引：7

作者：

MOGUL, HC

HAGLUND, RF

WEEKS, RA

KINSER, DL

TOLK, NH

WANG, PW

机构：

[1] VANDERBILT UNIV,CTR ATOM & MOLEC PHYS SURFACES,DEPT PHYS & ASTRON,NASHVILLE,TN 37235

[2] VANDERBILT UNIV,CTR ATOM & MOLEC PHYS SURFACES,DEPT MECH & MAT ENGN,NASHVILLE,TN 37235

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 03期

关键词：

D O I：

10.1116/1.575720

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1428 / 1434

页数：7

共 15 条

[1] LUMINESCENCE EXCITED IN SIO2 DURING ION-IMPLANTATION [J].

ABUHASSAN, LH ;

TOWNSEND, PD ;

WEBB, RP .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 19-20 :927-930

[2]

GREAVES GN, 1978, PHYSICS SIO2 ITS INT

[3] E' CENTER IN GLASSY SIO2 - MICROWAVE SATURATION PROPERTIES AND CONFIRMATION OF THE PRIMARY SI-29 HYPERFINE-STRUCTURE [J].

GRISCOM, DL .

PHYSICAL REVIEW B, 1979, 20 (05) :1823-1834

[4] MECHANISMS OF ELECTRON-STIMULATED AND PHOTON-STIMULATED DESORPTION IN ALKALI-HALIDES [J].

HAGLUND, RF ;

ALBRIDGE, RG ;

CHERRY, DW ;

COLE, RK ;

MENDENHALL, MH ;

PEATMAN, WCB ;

TOLK, NH ;

NILES, D ;

MARGARITONDO, G ;

STOFFEL, NG ;

TAGLAUER, E .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1986, 13 (1-3) :525-532

[5] DOPPLER-SHIFT LASER FLUORESCENCE SPECTROSCOPY OF SPUTTERED AND EVAPORATED ATOMS UNDER AR+ BOMBARDMENT [J].

HUSINSKY, W ;

GIRGIS, I ;

BETZ, G .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (05) :1543-1545

[6] LUMINESCENCE DURING ION-IMPLANTATION OF SILICA [J].

JAQUE, F ;

TOWNSEND, PD .

NUCLEAR INSTRUMENTS & METHODS, 1981, 182 (APR) :781-786

[7]

JONES CE, 1978, PHYSICS SIO2 ITS INT

[8]

KING DJ, 1969, SURF SCI, V16, P137

[9] DIPOLAR BROADENING OF MAGNETIC RESONANCE LINES IN MAGNETICALLY DILUTED CRYSTALS [J].

KITTEL, C ;

ABRAHAMS, E .

PHYSICAL REVIEW, 1953, 90 (02) :238-239

[10]

TOLK NH, 1985, DESORPTION INDUCED E

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