DOPPLER-SHIFT LASER FLUORESCENCE SPECTROSCOPY OF SPUTTERED AND EVAPORATED ATOMS UNDER AR+ BOMBARDMENT

被引:27
作者
HUSINSKY, W
GIRGIS, I
BETZ, G
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1985年 / 3卷 / 05期
关键词
D O I
10.1116/1.582982
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:1543 / 1545
页数:3
相关论文
共 15 条
  • [1] THE EFFECT OF ION MASS AND TARGET TEMPERATURE ON THE ENERGY-DISTRIBUTION OF SPUTTERED ATOMS
    AHMAD, S
    FARMERY, BW
    THOMPSON, MW
    [J]. NUCLEAR INSTRUMENTS & METHODS, 1980, 170 (1-3): : 327 - 330
  • [2] A SEARCH FOR A THERMAL SPIKE EFFECT IN SPUTTERING .1. TEMPERATURE-DEPENDENCE OF THE YIELD AT LOW-KEV, HEAVY-ION BOMBARDMENT
    BESOCKE, K
    BERGER, S
    HOFER, WO
    LITTMARK, U
    [J]. RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1982, 66 (1-2): : 35 - 41
  • [3] SPUTTERING OF ALKALI-HALIDES UNDER ION-BOMBARDMENT
    BIERSACK, JP
    SANTNER, E
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1982, 198 (01): : 29 - 32
  • [4] A SEARCH FOR A THERMAL SPIKE EFFECT IN SPUTTERING .2. TEMPERATURE-DEPENDENCE OF THE YIELD FOR HEAVY ATOMIC AND MOLECULAR ION-BOMBARDMENT
    HOFER, WO
    BESOCKE, K
    STRITZKER, B
    [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1983, 30 (02): : 83 - 86
  • [5] ENERGY-SPECTRA OF SPUTTERED NA ATOMS FROM BOMBARDMENT OF NACL WITH 20 KEV RARE-GAS IONS
    HUSINSKY, W
    BRUCKMULLER, R
    [J]. SURFACE SCIENCE, 1979, 80 (01) : 637 - 644
  • [6] THE APPLICATION OF DOPPLER-SHIFT LASER FLUORESCENCE SPECTROSCOPY FOR THE DETECTION AND ENERGY ANALYSIS OF PARTICLES EVOLVING FROM SURFACES
    HUSINSKY, W
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (05): : 1546 - 1559
  • [7] VELOCITY-MEASUREMENTS OF SPUTTERED PARTICLES USING THE LASER-DOPPLER METHOD
    HUSINSKY, W
    BRUCKMULLER, R
    BLUM, P
    [J]. NUCLEAR INSTRUMENTS & METHODS, 1980, 170 (1-3): : 287 - 293
  • [8] VELOCITY DISTRIBUTIONS AND SPUTTERING YIELDS OF CHROMIUM ATOMS UNDER ARGON, OXYGEN AND CARBON ION-BOMBARDMENT
    HUSINSKY, W
    BETZ, G
    GIRGIS, I
    VIEHBOCK, F
    BAY, HL
    [J]. JOURNAL OF NUCLEAR MATERIALS, 1984, 128 (DEC) : 577 - 582
  • [9] HUSINSKY W, 1984, J VAC SCI TECHNOL A, V2, P689
  • [10] AN INVESTIGATION OF THERMAL SPIKES BY STUDYING HIGH ENERGY SPUTTERING OF METALS AT ELEVATED TEMPERATURES
    NELSON, RS
    [J]. PHILOSOPHICAL MAGAZINE, 1965, 11 (110): : 291 - &