THE APPLICATION OF DOPPLER-SHIFT LASER FLUORESCENCE SPECTROSCOPY FOR THE DETECTION AND ENERGY ANALYSIS OF PARTICLES EVOLVING FROM SURFACES

被引:54
作者
HUSINSKY, W
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1985年 / 3卷 / 05期
关键词
D O I
10.1116/1.582983
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:1546 / 1559
页数:14
相关论文
共 85 条
[1]   INVESTIGATION OF METAL ATOM FLUXES FROM A REFERENCE LIMITER IN TEXTOR [J].
BAY, HL ;
SCHWEER, B .
JOURNAL OF NUCLEAR MATERIALS, 1984, 128 (DEC) :257-261
[2]   ENERGY-DEPENDENCE OF GOLD SELF-SPUTTERING [J].
BAY, HL ;
ANDERSEN, HH ;
HOFER, WO ;
NIELSEN, O .
NUCLEAR INSTRUMENTS & METHODS, 1976, 132 (JAN-F) :301-305
[3]   INVESTIGATION OF LIGHT-ION SPUTTERING OF TITANIUM USING LASER-INDUCED FLUORESCENCE [J].
BAY, HL ;
SCHWEER, B ;
BOGEN, P ;
HINTZ, E .
JOURNAL OF NUCLEAR MATERIALS, 1982, 111 (NOV-) :732-737
[4]   SURFACE NORMAL VELOCITY DISTRIBUTION OF SPUTTERED ZR-ATOMS FOR LIGHT-ION IRRADIATION [J].
BAY, HL ;
BERRES, W ;
HINTZ, E .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1982, 194 (1-3) :555-559
[5]  
BAY HL, 1984, NUCL INSTRUM METHO B, V2
[6]  
BAY HL, 1985, 1985 P S SURF PHYS O
[7]  
BERRES W, 1984, APPL PHYS B-PHOTO, V35, P83, DOI 10.1007/BF00697427
[8]   THE VELOCITY DISTRIBUTION OF SPUTTERED ZR ATOMS FOR IRRADIATION AT NORMAL AND OBLIQUE ANGLE OF INCIDENCE [J].
BERRES, W ;
BAY, HL .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1984, 33 (04) :235-241
[9]  
BERRES W, 1983, THESIS FRG
[10]  
BETZ G, 1983, TOP APPL PHYS, V52, P11