INVESTIGATION OF LIGHT-ION SPUTTERING OF TITANIUM USING LASER-INDUCED FLUORESCENCE

被引：54

作者：

BAY, HL

SCHWEER, B

BOGEN, P

HINTZ, E

机构：

来源：

关键词：

D O I：

10.1016/0022-3115(82)90297-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：732 / 737

页数：6

共 21 条

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[7] AN ANALYTICAL FORMULA AND IMPORTANT PARAMETERS FOR LOW-ENERGY ION SPUTTERING
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[8] BOHDANSKY J, 1976, 9TH P S FUS TECHN, P541
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[10] MEASUREMENT OF THE DENSITY AND VELOCITY DISTRIBUTION OF SPUTTERED AL IN EBT-S BY LASER-INDUCED FLUORESCENCE
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