DEPENDENCE OF LIGHT-ION SPUTTERING YIELDS OF IRON ON ION FLUENCE AND OXYGEN PARTIAL-PRESSURE

被引:51
作者
BEHRISCH, R [1 ]
ROTH, J [1 ]
BOHDANSKY, J [1 ]
MARTINELLI, AP [1 ]
SCHWEER, B [1 ]
RUSBULDT, D [1 ]
HINTZ, E [1 ]
机构
[1] FORSCHUNGSZENTRUM JULICH, INST PLASMA PHYS, D-5170 JULICH 1, FED REP GER
关键词
D O I
10.1016/0022-3115(80)90187-7
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:645 / 655
页数:11
相关论文
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