AN ANALYTICAL FORMULA AND IMPORTANT PARAMETERS FOR LOW-ENERGY ION SPUTTERING

被引：210

作者：

BOHDANSKY, J ^{[1
]}

ROTH, J ^{[1
]}

BAY, HL ^{[1
]}

机构：

[1] EURATOM,KERNFORSCHUNGSANLAGE JULICH,INST PLASMAPHYS,D-5170 JULICH,FED REP GER

来源：

关键词：

D O I：

10.1063/1.327954

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2861 / 2865

页数：5

共 24 条

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