ATOM EJECTION STUDIES FOR SPUTTERING OF SEMICONDUCTORS

[1] TEMPERATURE DEPENDENCE OF EJECTION PATTERNS IN GE SPUTTERING [J]. JOURNAL OF APPLIED PHYSICS, 1963, 34 (12) : 3492 - &

[2] ATOM EJECTION PATTERNS IN SINGLE-CRYSTAL SPUTTERING [J]. JOURNAL OF APPLIED PHYSICS, 1960, 31 (12) : 2305 - 2313

[3] SPUTTERING OF DIELECTRICS BY HIGH-FREQUENCY FIELDS [J]. JOURNAL OF APPLIED PHYSICS, 1962, 33 (10) : 2991 - &

[4] TEMPERATURE DEPENDENCE OF EJECTION PATTERNS IN GE, SI, INSB, AND INAS SPUTTERING [J]. SURFACE SCIENCE, 1964, 2 : 367 - 375

[5] BILLINGTON DS, 1962, RADIATION DAMAGE ED, P330

[6] CHARACTERISTICS OF THE (111) SURFACES OF THE III-V INTERMETALLIC COMPOUNDS [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1960, 107 (05) : 427 - 433

[7] GERMAGNOLI E, 1962, RADIATION DAMAGE SOL, P330

[8] HASIGUTI RR, 1965, 7 C INT EFF RAYONN S, P259

[9] ANNEALING OF GAMMA-RAY IRRADIATED N-TYPE GERMANIUM [J]. JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1963, 24 (08) : 1033 - &

[10] STUDY OF ION-BOMBARDMENT DAMAGE ON A GE (111) SURFACE BY LOW-ENERGY ELECTRON DIFFRACTION [J]. JOURNAL OF APPLIED PHYSICS, 1965, 36 (09) : 2674 - &

[1] TEMPERATURE DEPENDENCE OF EJECTION PATTERNS IN GE SPUTTERING [J]. JOURNAL OF APPLIED PHYSICS, 1963, 34 (12) : 3492 - &

[2] ATOM EJECTION PATTERNS IN SINGLE-CRYSTAL SPUTTERING [J]. JOURNAL OF APPLIED PHYSICS, 1960, 31 (12) : 2305 - 2313

[3] SPUTTERING OF DIELECTRICS BY HIGH-FREQUENCY FIELDS [J]. JOURNAL OF APPLIED PHYSICS, 1962, 33 (10) : 2991 - &

[4] TEMPERATURE DEPENDENCE OF EJECTION PATTERNS IN GE, SI, INSB, AND INAS SPUTTERING [J]. SURFACE SCIENCE, 1964, 2 : 367 - 375

[5] BILLINGTON DS, 1962, RADIATION DAMAGE ED, P330

[6] CHARACTERISTICS OF THE (111) SURFACES OF THE III-V INTERMETALLIC COMPOUNDS [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1960, 107 (05) : 427 - 433

[7] GERMAGNOLI E, 1962, RADIATION DAMAGE SOL, P330

[8] HASIGUTI RR, 1965, 7 C INT EFF RAYONN S, P259

[9] ANNEALING OF GAMMA-RAY IRRADIATED N-TYPE GERMANIUM [J]. JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1963, 24 (08) : 1033 - &

[10] STUDY OF ION-BOMBARDMENT DAMAGE ON A GE (111) SURFACE BY LOW-ENERGY ELECTRON DIFFRACTION [J]. JOURNAL OF APPLIED PHYSICS, 1965, 36 (09) : 2674 - &