ATOM EJECTION PATTERNS IN SINGLE-CRYSTAL SPUTTERING

被引：72

作者：

ANDERSON, GS

WEHNER, GK

机构：

来源：

关键词：

D O I：

10.1063/1.1735543

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2305 / 2313

页数：9

共 20 条

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[5] THEORY OF THE SPUTTERING PROCESS [J].

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[9]

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[10]

KOEDAM J, 1958, PHYSICA, V24, P692