PLATINUM CARBON MULTILAYER REFLECTORS FOR SOFT-X-RAY OPTICS

被引：24

作者：

LODHA, GS

YAMASHITA, K

SUZUKI, T

HATSUKADE, I

TAMURA, K

ISHIGAMI, T

TAKAHAMA, S

NAMBA, Y

机构：

[1] NAGOYA UNIV, DEPT PHYS, CHIKUSA KU, NAGOYA 46401, JAPAN

[2] MITSUBISHI ELECT CO LTD, TOKYO 141, JAPAN

[3] MIYAZAKI UNIV, DEPT ELECTR ENGN, MIYAZAKI 88921, JAPAN

[4] SONY CORP, ATSUGI, KANAGAWA 243, JAPAN

[5] CANON INC, TOKYO 146, JAPAN

[6] OSAKA UNIV, DEPT EARTH & SPACE SCI, TOYONAKA, OSAKA 560, JAPAN

[7] CHUBU UNIV, DEPT MECH ENGN, KASUGAI, AICHI 487, JAPAN

来源：

APPLIED OPTICS | 1994年 / 33卷 / 25期

关键词：

MULTILAYER; EXTREME-ULTRAVIOLET OPTICS; SYNCHROTRON RADIATION;

D O I：

10.1364/AO.33.005869

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We have fabricated Platinum/carbon (Pt/C) multilayer reflectors with 2d spacaings between 50 and 200 angstrom, using an electron-beam evaporator. We investigated the effects of 2d values, the number of layer pairs, substrate temperature, coatings, and the long-term stability on the reflectivity performance by using characteristic x rays and monochromatized synchrotron radiation in the 0.8-8-keV region. In this study we show that Pt/C multilayers with 10-20 layer pairs exhibit high and stable soft-x-ray reflectivity. The interfacial roughness was measured in the range of 5 angstrom and becomes lower for structures deposited at liquid-nitrogen temperatures. Coating these reflectors with a 100-angstrom-thick platinum layer increased the grazing angle reflectivity without significantly lowering the Bragg peak reflectivity.

引用

页码：5869 / 5874

页数：6

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