ROUGHNESS MEASUREMENT OF X-RAY MIRROR SURFACES

被引:28
作者
KUNIEDA, H
HAYAKAWA, S
HIRANO, T
KII, T
NAGASE, F
SATO, N
TAWARA, Y
MAKINO, F
YAMASHITA, K
机构
[1] INST SPACE & ASTRONAUT SCI,MEGURO KU,TOKYO 153,JAPAN
[2] OSAKA UNIV,FAC SCI,DEPT PHYS,TOYONAKA,OSAKA 560,JAPAN
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1986年 / 25卷 / 09期
关键词
D O I
10.1143/JJAP.25.1292
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:1292 / 1299
页数:8
相关论文
共 9 条
[1]   MEASUREMENT OF RMS ROUGHNESS, AUTOCOVARIANCE FUNCTION AND OTHER STATISTICAL PROPERTIES OF OPTICAL SURFACES USING A FECO SCANNING INTERFEROMETER [J].
BENNETT, JM .
APPLIED OPTICS, 1976, 15 (11) :2705-2721
[2]   STYLUS PROFILING INSTRUMENT FOR MEASURING STATISTICAL PROPERTIES OF SMOOTH OPTICAL-SURFACES [J].
BENNETT, JM ;
DANCY, JH .
APPLIED OPTICS, 1981, 20 (10) :1785-1802
[3]   MEASUREMENT OF FINISH OF DIAMOND-TURNED METAL-SURFACES BY DIFFERENTIAL LIGHT-SCATTERING [J].
CHURCH, EL ;
JENKINSON, HA ;
ZAVADA, JM .
OPTICAL ENGINEERING, 1977, 16 (04) :360-374
[4]   THE X-RAY-IMAGING TELESCOPES ON EXOSAT [J].
DEKORTE, PAJ ;
BLEEKER, JAM ;
DENBOGGENDE, AJF ;
BRANDUARDIRAYMONT, G ;
BRINKMAN, AC ;
CULHANE, JL ;
GRONENSCHILD, EHB ;
MASON, I ;
MCKECHNIE, SP .
SPACE SCIENCE REVIEWS, 1981, 30 (1-4) :495-511
[5]   ASSESSMENT OF SURFACE-ROUGHNESS BY X-RAY-SCATTERING AND DIFFERENTIAL INTERFERENCE CONTRAST MICROSCOPY [J].
DEKORTE, PAJ ;
LAINE, R .
APPLIED OPTICS, 1979, 18 (02) :236-242
[6]   EINSTEIN (HEAO-2) X-RAY-OBSERVATORY [J].
GIACCONI, R ;
BRANDUARDI, G ;
BRIEL, U ;
EPSTEIN, A ;
FABRICANT, D ;
FEIGELSON, E ;
FORMAN, W ;
GORENSTEIN, P ;
GRINDLAY, J ;
GURSKY, H ;
HARNDEN, FR ;
HENRY, JP ;
JONES, C ;
KELLOGG, E ;
KOCH, D ;
MURRAY, S ;
SCHREIER, E ;
SEWARD, F ;
TANANBAUM, H ;
TOPKA, K ;
VANSPEYBROECK, L ;
HOLT, SS ;
BECKER, RH ;
BOLDT, EA ;
SERLEMITSOS, PJ ;
CLARK, G ;
CANIZARES, C ;
MARKERT, T ;
NOVICK, R ;
HELFAND, D ;
LONG, K .
ASTROPHYSICAL JOURNAL, 1979, 230 (02) :540-550
[7]  
Mandelbrot B., 1977, FRACTAL GEOMETRY NAT
[8]  
Namba Y., 1978, ANN CIRP, V27, P511
[9]   OPTICAL HETERODYNE PROFILOMETRY [J].
SOMMARGREN, GE .
APPLIED OPTICS, 1981, 20 (04) :610-618