OPTICAL HETERODYNE PROFILOMETRY

被引：210

作者：

SOMMARGREN, GE

机构：

来源：

APPLIED OPTICS | 1981年 / 20卷 / 04期

关键词：

D O I：

10.1364/AO.20.000610

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

收藏

页码：610 / 618

页数：9

相关论文

共 11 条

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[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (01): : 496 - 500
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[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1963, 53 (12) : 1394 - &
[10] ROUGHNESS CHARACTERIZATION OF SMOOTH MACHINED SURFACES BY LIGHT-SCATTERING
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