MEASUREMENT OF RMS ROUGHNESS, AUTOCOVARIANCE FUNCTION AND OTHER STATISTICAL PROPERTIES OF OPTICAL SURFACES USING A FECO SCANNING INTERFEROMETER

被引：202

作者：

BENNETT, JM ^{[1
]}

机构：

[1] USN,CTR WEAP,MICHELSON LABS,CHINA LAKE,CA 93555

来源：

APPLIED OPTICS | 1976年 / 15卷 / 11期

关键词：

D O I：

10.1364/AO.15.002705

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：2705 / 2721

页数：17

共 44 条

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[9]

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[10]

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