ASSESSMENT OF SURFACE-ROUGHNESS BY X-RAY-SCATTERING AND DIFFERENTIAL INTERFERENCE CONTRAST MICROSCOPY

被引：30

作者：

DEKORTE, PAJ ^{[1
]}

LAINE, R ^{[1
]}

机构：

[1] ESTEC,EUROPEAN SPACE AGCY,DEPT SPACE SCI,NOORDWIJK,NETHERLANDS

来源：

APPLIED OPTICS | 1979年 / 18卷 / 02期

关键词：

D O I：

10.1364/AO.18.000236

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

X-ray scattering measurements at 8.3 Å and 13.3 Å are employed to study surface roughness down to 2.5-Å rms.The x-ray setup is described, and its sensitivity is discussed.The scattering data are analyzed by electromagnetic scattering theory to give information about the surface roughness.Micrographs of the same surfaces are made by differential interference contrast microscopy.A good correlation between these micrographs and the results from the x-ray scattering measurements is established, which indicates that differential interference contrast microscopy is a very useful tool for the evaluation of highly polished surfaces.© 1979 Optical Society of America.

引用

页码：236 / 242

页数：7

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