MICROMACHINED ELECTROCHEMICAL FLOW CELL FOR BIOSENSING

被引:17
作者
MURAKAMI, Y
UCHIDA, T
TAKEUCHI, T
TAMIYA, E
KARUBE, I
SUDA, M
机构
[1] UNIV TOKYO,ADV SCI & TECHNOL RES CTR,MEGURO KU,TOKYO 153,JAPAN
[2] SEIKO INSTRUMENTS INC,ADV TECHNOL RES LAB,CHIBA 271,JAPAN
关键词
MICROMACHINING; BIOSENSOR; FLOW CELL; MINIATURIZATION;
D O I
10.1002/elan.1140060904
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
A miniaturized electrochemical flow cell was fabricated on a silicon substrate using micromachining techniques, including photolithography, vacuum deposition, anisotropic etching, and fusion bonding. The flow cell consisted of a glass plate with gold electrodes, a silicon chip with a V-shaped groove, and immobilized glucose oxidase. Hydrogen peroxide and glucose were measured by direct-batch injection and by using the device in flow-injection analysis (FIA) system.
引用
收藏
页码:735 / 739
页数:5
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